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CAS: 27804-64-4
分子式: C8H22N2Si
分子量: 174.36
沸点: 70 °C at 30 mmHg
中文名称: 
双(二乙基氨基)硅烷
英文名称: 
bis(diethylamino)silane
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货号品牌产品名称规格包装、参考价格
779545MACKLIN双(二乙氨基)硅烷90%549元/1g;   2199元/5g;   咨询
储存:室温, 密封, 干燥
14-7030StremBis(diethylamino)silane97%1890元/5g;   7575元/25g;   咨询

Technical Notes:

1.Plasma-Assisted ALD for the Conformal Deposition of SiO2

Room-Temperature ALD of Metal Oxide Thin Films by Energy- Enhanced AL D

2.Atomic L ayer Deposition of Silica on Carbon Nanotubes

3.Area-Selective Atomic L ayer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle

References:

1.J. Electrochem. Soc., 2012, 159, H277.

2.Chem. Vap. Deposition, 2013, 19, 125.

3.Chem. Mater., 2017, 29, 4920.

4.ACS Nano, 2017, 11, 9303.

98-8810StremBis(diethylamino)silane99% (99.999%-Si)2745元/5g;   10935元/25g;   咨询

Technical Notes:

1.AL D/CVD precursor for Si thin films

References: 1.J. Electrochem. Soc. 2008, 155, G163 2.ECS Transactions, 2011, 35, 191 3.J. Electrochem. Soc 2012. 159, H277 4.Chem. Vap. Deposition 2013 19, 125 5.IEEE Electron Device L ett. 2010, 31, 857 6.J. Vac. Sci. Technol. A, 2015, 33, 01A137 7.C hem. Mater. 2017.29, 4920 8.Plasma Process Polym. 2019, 16, 1 900032 9.Nanotechnology.2021 32. 075706 10.J. Vac. Sci. Technol. A. 2016, 34, 01A136
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