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CAS: 169896-41-7
分子式: C16H39N4Ta
分子量: 468.48
沸点: 95 ℃ at 0.5 mmHg
英文名称: 
(tert-butylimino)tris(diethylamino)tantalum
推荐供应商
货号品牌产品名称规格包装、参考价格
T921144MACKLIN三(二乙基氨基)叔丁酰胺钽99%, ≥99.99% trace metals basis1219元/1ml;   咨询
储存:室温
73-0723Strem(t-Butylimido)tris(diethylamino)tantalum(V)min. 98% (99.99%-Ta) PURATREM TBTDET705元/250mg;   1516元/1g;   6076元/5g;   咨询

Technical Note:

1. Useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

References:

1.Journal of Nanosci. and Nanotechno., 2013, 13, 4097. 2.Semicond. Sci. Tech., 2012, 27, 074003/1.

3.Chem. Vapor Depos., 2011, 17, 37. I

4.Electrochem. Solid St., 2010, 13, H426.

5. J. Electrochem. Soc., 2010, 157, H652.

6.J.Electrochem. Soc., 2009, 156, H852.

043419Alfa AesarTantalum tris(diethylamido)-tert-butylimide99.99% (metals basis)1311元/1g;   6124元/5g;   28445元/25g;   咨询

应用
Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.

备注
Store under dry inert gas. It is sensitive to moisture and air. Protect from humidity and water. Keep container tightly sealed. Store in cool, dry conditions in well sealed containers.

基本信息

MDL
MFCD02684506

分子式
C16H39N4Ta

分子量
468.48

沸点
90°/0.1mm

灵敏度
Air Sensitive. Moisture Sensitive. Ambient temperatures.

形态
Liquid, Ampouled under argon

溶解性
Reacts with water.

GHS危害和防范说明

GHS符号

Hazard Statements
H261-H314-H318
In contact with water releases flammable gas.Causes severe skin burns and eye damage.Causes serious eye damage.

Precautionary Statements
P223-P231+P232-P303+P361+P353-P305+P351+P338-P405-P501a
Keep away from any possible contact with water, because of violent reaction and possible flash fire.Handle under inert gas. Protect from moisture.IF ON SKIN (or hair): Remove/Take off immediately all contaminated clothing. Rinse skin with water/shower.IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.Store locked up.Dispose of contents/container in accordance with local/regional/national/international regulations.

安全信息

危险等级
4.3

包装组
II

危险类别
14-34
Reacts violently with water.Causes burns.

安全等级
8-20-26-30-36/37/39-45
Keep container dry.When using do not eat or drink.In case of contact with eyes, rinse immediately with plenty of water and seek medical advice.Never add water to this product.Wear suitable protective clothing, gloves and eye/face protection.In case of accident or if you feel unwell, seek medical advice immediately (show the label where possible).

欧盟危险品标志

TSCA

521280Sigma-AldrichTris(diethylamido)(tert-butylimido)tantalum(V)99%, ≥99.99% trace metals basis3845.88元/5 ML;   咨询

产品说明

一般描述

Atomic number of base material: 73 Tantalum

包装

5 mL in ampule

基本信息

线性分子式(CH3)3CNTa(N(C2H5)2)3
分子量468.46
MDL编号MFCD02684506
PubChem化学物质编号24874200
NACRESNA.23

产品性质

质量水平200
测定≥99.99% trace metals basis
99%
形式liquid
reaction suitabilitycore: tantalum
reagent type: catalyst
密度1.252 g/mL at 25 ℃ (lit.)
SMILES stringCCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
InChI1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
InChI keyYYKBKTFUORICGA-UHFFFAOYSA-N
668990Sigma-AldrichTris(diethylamido)(tert-butylimido)tantalum(V)packaged for use in deposition systems17126.3元/10 G;   咨询

产品说明

一般描述

Atomic number of base material: 73 Tantalum

应用

Precursors Packaged for Depositions Systems

包装

10 g in stainless steel cylinder

基本信息

线性分子式(CH3)3CNTa(N(C2H5)2)3
分子量468.46
MDL编号MFCD02684506
PubChem化学物质编号24885014
NACRESNA.23

产品性质

质量水平100
测定≥99.99% (trace metals analysis)
形式liquid
reaction suitabilitycore: tantalum
密度1.252 g/mL at 25 ℃ (lit.)
SMILES stringCCN(CC)[Ta](=NC(C)(C)C)(N(CC)CC)N(CC)CC
InChI1S/C4H9N.3C4H10N.Ta/c1-4(2,3)5;3*1-3-5-4-2;/h1-3H3;3*3-4H2,1-2H3;/q;3*-1;+3
InChI keyYYKBKTFUORICGA-UHFFFAOYSA-N
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